FP6 • Semiconductors • Metrology
SOCOT
Breakthrough overlay control technology based on scatterometry for the semiconductor industry (32 nm nodes and beyond).
Publications (from project section)
- B. Salski, M. Celuch, W. Gwarek, “Evaluation of FDTD regimes for scattering from periodic structures”, ACES 2007.
- B. Salski, W. Gwarek, “Hybrid FDTD-Fresnel modeling of microscopy imaging”, Applied Optics 2009.
- …and further items from the SOCOT project page.