D-Band Fabry-Perot Open Resonator
Dielectrics
Non-contact FPOR measurements deliver ε and tanδ of bulk dielectrics.
Polymers
The open resonator quantifies ε and tanδ of low-loss polymer sheets without electrodes.
Ultra-Thin FIlms
FPOR resolves dielectric properties of films just a few µm thick by analysing minute Q-factor shifts,
Higly-Resistive Semiconductors
extracts bulk resistivity of semiconductors like Si or SiC.
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110 – 170 GHz |
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Dk = 1 – 15 (achievable accuracy: ±0.5 %) |
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Df < 5 × 10-5 (achievable accuracy: 5 %) |
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1 µm – 3 mm |
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> 50 mm |
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> 3 minutes |
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room |
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See also Broadband FPOR
*On the picture, there is a Rohde & Schwarz Vector Network Analyzer connected to the D-Band Fabry-Perot Open Resonator.
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| Measurement results of various dielectric materials obtained with Fabry-Perot Open Resonator fixture | |
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