Fabry-Perot Open Resonator
Dielectrics
Non-contact FPOR measurements deliver ε and tanδ of bulk dielectrics.
Polymers
The open resonator quantifies ε and tanδ of low-loss polymer sheets without electrodes.
Ultra-Thin FIlms
FPOR resolves dielectric properties of films just a few µm thick by analysing minute Q-factor shifts,
Higly-Resistive Semiconductors
extracts bulk resistivity of semiconductors like Si or SiC.
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10 – 130 GHz* |
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Dk = 1 – 15 (achievable accuracy ± 0.2 %) |
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Df > 5 × 10–6 (achievable accuracy ± 2 %) |
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1 µm – 3 mm |
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105 – 145 mm ** |
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> 1 minute |
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room, 0 – 80 °C (on request) |
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*Available also in various frequency-range configurations (e.g. 10 – 26.5 GHz, 10 – 43 GHz, 10 – 50 GHz, 10 – 67 GHz, 10 – 110 GHz, etc.)
** minimum required sample size may differ depending on chosen measurement frequency range
Now available – D-Band Fabry-Perot Open Resonator up to 170 GHz
Overview
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Repeatability
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Polymers
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In-plane anisotropy
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Highly-resistive semiconductors
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Thin films on substrates
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Link to contact us via form:
Dielectric measurements with a Fabry-Perot open resonator (up to 130 GHz)
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