2D Split-Post Dielectric Resonator
Dielectrics
Non-contact FPOR measurements deliver ε and tanδ of bulk dielectrics.
Polymers
The open resonator quantifies ε and tanδ of low-loss polymer sheets without electrodes.
Ultra-Thin FIlms
FPOR resolves dielectric properties of films just a few µm thick by analysing minute Q-factor shifts,
Higly-Resistive Semiconductors
extracts bulk resistivity of semiconductors like Si or SiC.
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10 GHz |
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Dk = 1 – 100 (accuracy ± 0.15%) |
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Df > 2 × 10−5 (accuracy ≤ 2%) |
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ρ = 102 – 104 Ω·cm |
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few µm up to 1 mm |
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up to 80 × 120 mm |
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