2D Split-Post Dielectric Resonator
Dielectrics
Non-contact FPOR measurements deliver ε and tanδ of bulk dielectrics.
Polymers
The open resonator quantifies ε and tanδ of low-loss polymer sheets without electrodes.
Ultra-Thin FIlms
FPOR resolves dielectric properties of films just a few µm thick by analysing minute Q-factor shifts,
Higly-Resistive Semiconductors
extracts bulk resistivity of semiconductors like Si or SiC.
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10 GHz |
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0.1 – 106 1/(Ω·m) |
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10−4 – 103 Ω·cm |
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10−1 – 2 × 104 Ω/sq |
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few µm up to 1 mm |
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up to 80 × 120 mm |
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